Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Li-Jui Chen0
Ting-Ya Cheng0
Han-Lung Chang0
Chun-Lin Chang0
Date of Patent
October 29, 2024
0Patent Application Number
175628190
Date Filed
December 27, 2021
0Patent Citations
0
...
Patent Primary Examiner
Patent abstract
An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.
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