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US Patent 12137558 Staircase structure for memory device
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Patent
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Date Filed
November 10, 2022
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Date of Patent
November 5, 2024
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Patent Application Number
18054468
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Patent Citations
US Patent 9343452 Semiconductor devices having conductive pads and methods of fabricating the same
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US Patent 9373540 Semiconductor device and method of fabricating the same
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US Patent 9406609 Opening structure and manufacturing method thereof and interconnection structure
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US Patent 9419013 Semiconductor device and method of manufacturing the same
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US Patent 9478487 Semiconductor package
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US Patent 9520402 Provision of etch stop for wordlines in a memory device
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US Patent 9711603 Semiconductor device and method for manufacturing the same
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US Patent 9741563 Hybrid stair-step etch
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US Patent 9941153 Pad structure and manufacturing method thereof
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US Patent 10002880 Semiconductor device and method for manufacturing same
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•••
Patent Inventor Names
Jifeng Zhu
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Kun Bao
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Zhenyu Lu
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Lan Yao
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A Man Zheng
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Jun Chen
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Si Ping Hu
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Xiaowang Dai
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Haohao Yang
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Li Hong Xiao
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•••
Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12137558
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Patent Primary Examiner
Scott B. Geyer
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