Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven M. Zuniga0
Date of Patent
March 29, 2005
0Patent Application Number
103274300
Date Filed
December 20, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A carrier head for chemical mechanical polishing of a substrate has a base and a retaining ring positioned beneath the base. The retaining ring includes a main portion with a first surface to apply a load to a perimeter portion of the back surface of the substrate and an annular projection with a second surface to retain the substrate. A bottom surface of the projection is separated from a top surface of a polishing pad by a gap.
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