US Patent 6872130 Carrier head with non-contact retainer
Patent 6872130 was granted and assigned to Applied Materials on March, 2005 by the United States Patent and Trademark Office.
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Patent abstract
A carrier head for chemical mechanical polishing of a substrate has a base and a retaining ring positioned beneath the base. The retaining ring includes a main portion with a first surface to apply a load to a perimeter portion of the back surface of the substrate and an annular projection with a second surface to retain the substrate. A bottom surface of the projection is separated from a top surface of a polishing pad by a gap.
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Patent Inventor Names
Steven M. Zuniga0
Date of Patent
March 29, 2005
0Patent Application Number
103274300
Date Filed
December 20, 2002
0Patent Primary Examiner
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US Patent 6872130 Carrier head with non-contact retainer
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