Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bill H Quon0
Date of Patent
April 26, 2005
0Patent Application Number
107214130
Date Filed
November 26, 2003
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
A method for determining the potential of a plasma in a processing chamber includes determining voltages of respective plasma engaging surfaces of at least two plasma generating electrodes disposed within the processing chamber and determining the plasma potential by comparing the determined voltages and equating the highest determined voltage to the plasma potential.
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