Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christopher M. Aubuchon0
Date of Patent
May 31, 2005
0Patent Application Number
103744180
Date Filed
February 24, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
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