US Patent 6900922 Multi-tilt micromirror systems with concealed hinge structures
Patent 6900922 was granted and assigned to Exajoule on May, 2005 by the United States Patent and Trademark Office.
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Patent abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
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Patent Inventor Names
Christopher M. Aubuchon0
Date of Patent
May 31, 2005
0Patent Application Number
103744180
Date Filed
February 24, 2003
0Patent Primary Examiner
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US Patent 6900922 Multi-tilt micromirror systems with concealed hinge structures
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