US Patent 6905543 Methods of forming tungsten nucleation layer
Patent 6905543 was granted and assigned to Novellus Systems on June, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 19, 2002
0
Date of Patent
June 14, 2005
0
Patent Application Number
10174628
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Patent Inventor Names
James A. Fair
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Junghwan Sung
0
Nerissa Taylor
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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