Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroichi Inada0
Issei Ueda0
Date of Patent
July 19, 2005
0Patent Application Number
095505920
Date Filed
April 17, 2000
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A CCD camera and a laser displacement measurement apparatus are provided on a transfer apparatus for transferring a wafer between processing units. The transfer apparatus performs a predetermined image pickup in each processing unit with the CCD camera and the laser displacement measurement apparatus 62 to perform monitoring of a required place in the processing unit. According to the above configuration, it is possible to monitor the required place in the processing unit without an increase in number of components and further without consideration of a space for provision of an image pickup means.
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