US Patent 6919913 Processing system
Patent 6919913 was granted and assigned to Tokyo Electron on July, 2005 by the United States Patent and Trademark Office.
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Patent abstract
A CCD camera and a laser displacement measurement apparatus are provided on a transfer apparatus for transferring a wafer between processing units. The transfer apparatus performs a predetermined image pickup in each processing unit with the CCD camera and the laser displacement measurement apparatus 62 to perform monitoring of a required place in the processing unit. According to the above configuration, it is possible to monitor the required place in the processing unit without an increase in number of components and further without consideration of a space for provision of an image pickup means.
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Patent Inventor Names
Hiroichi Inada0
Issei Ueda0
Date of Patent
July 19, 2005
0Patent Application Number
095505920
Date Filed
April 17, 2000
0Patent Primary Examiner
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US Patent 6919913 Processing system
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