US Patent 6934606 Automatic calibration of a wafer-handling robot
Patent 6934606 was granted and assigned to Novellus Systems on August, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 20, 2003
0
Date of Patent
August 23, 2005
0
Patent Application Number
10600667
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Patent Citations Received
Patent Inventor Names
Damon Genetti
0
Mikhail Bojinov
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Stephan Minard
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Wayne Tang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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