Patent attributes
An implantable miniaturized pressure sensor integrates a capacitor and an inductor in one small chip, forming a resonant LC circuit having a Q value of 10 or greater. The capacitor has an upper capacitor plate and a lower capacitor plate disposed proximate thereof. The upper and lower capacitor plates are connected to one or more spiral inductor coils. The sensor is micromachined from silicon to form a thin and robust membrane disposed on top of the upper capacitor plate. The sensor is hermetically sealed and the membrane is deflected relative to the upper capacitor plate by an external fluid, gas, or mechanical pressure. The resonant frequency of the sensor can be remotely monitored and continuously measured with an external detector pick up coil disposed proximate the sensor. The sensor can be smaller than 2×2×0.5 mm and is particularly useful for intraocular applications.
