US Patent 6962003 High-speed drying apparatus

Disclosed is a high-speed drying apparatus for drying objects which are rinsed with non-volatile or volatile liquid. The drying apparatus is capable of quickly drying such objects at a reduced cost, not permitting their oxidation. First, the rinsing liquid remaining on objects is substantially removed, still allowing small quantities of rinse to remain thereon. The substantial removal step is immediately followed by the complete removal of the still remaining liquid in the super dry atmosphere.