US Patent 6962003 High-speed drying apparatus
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Patent abstract
Disclosed is a high-speed drying apparatus for drying objects which are rinsed with non-volatile or volatile liquid. The drying apparatus is capable of quickly drying such objects at a reduced cost, not permitting their oxidation. First, the rinsing liquid remaining on objects is substantially removed, still allowing small quantities of rinse to remain thereon. The substantial removal step is immediately followed by the complete removal of the still remaining liquid in the super dry atmosphere.
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Patent Inventor Names
Masaki Motegi0
Toshinori Takemori0
Date of Patent
November 8, 2005
0Patent Application Number
107931220
Date Filed
March 3, 2004
0Patent Primary Examiner
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US Patent 6962003 High-speed drying apparatus
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