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US Patent 6962835 Method for room temperature metal direct bonding

Patent 6962835 was granted and assigned to Ziptronix on November, 2005 by the United States Patent and Trademark Office.

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Patent
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Current Assignee
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Ziptronix
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
69628350
Patent Inventor Names
Anthony Scot Rose0
Paul M. Enquist0
Qin-Yi Tong0
Date of Patent
November 8, 2005
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Patent Application Number
103596080
Date Filed
February 7, 2003
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Patent Citations Received
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US Patent 12136605 Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics and method for forming the same
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US Patent 12113056 Stacked dies and methods for forming bonded structures
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US Patent 12125784 Interconnect structures
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US Patent 12132020 Low temperature bonded structures
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US Patent 11862586 Semiconductor device and method of manufacturing the same
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Patent Primary Examiner
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William Brewster
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Patent abstract

A bonded device structure including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads formed by contact bonding of the first non-metallic region to the second non-metallic region. At least one of the first and second substrates may be elastically deformed.

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