US Patent 6966967 Variable speed pump control
Patent 6966967 was granted and assigned to Applied Materials on November, 2005 by the United States Patent and Trademark Office.
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Patent abstract
A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
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Patent Inventor Names
Daniel Paul Greenbank0
Danny Cam Toan Lu0
Mark William Curry0
Date of Patent
November 22, 2005
0Patent Application Number
104001740
Date Filed
March 26, 2003
0Patent Primary Examiner
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US Patent 6966967 Variable speed pump control
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