US Patent 6966967 Variable speed pump control
Patent 6966967 was granted and assigned to Applied Materials on November, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 26, 2003
0
Date of Patent
November 22, 2005
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Patent Application Number
10400174
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Patent Citations Received
Patent Inventor Names
Daniel Paul Greenbank
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Danny Cam Toan Lu
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Mark William Curry
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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