Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James W. Blatchford0
Date of Patent
November 29, 2005
0Patent Application Number
107269880
Date Filed
December 3, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a system for custom-polarized photolithography illumination includes an illuminator operable to generate an illumination pattern of light, a polarizer unit operable to variably polarize the light, and a mask pattern defining photolithographic pattern features in two dimensions. The mask pattern is associated with a mask capable of transmitting at least a portion of the variably polarized light through the mask pattern.
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