US Patent 6989921 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
Patent 6989921 was granted and assigned to Corning on January, 2006 by the United States Patent and Trademark Office.
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Patent abstract
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
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Patent Inventor Names
Gregory A. Kirkos0
Jonathan Bernstein0
Marc Waelti0
William P. Taylor0
Date of Patent
January 24, 2006
0Patent Application Number
099394220
Date Filed
August 24, 2001
0Patent Primary Examiner
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US Patent 6989921 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
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