Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuma Sekiya0
Toshiyuki Yoshikawa0
Date of Patent
February 14, 2006
0Patent Application Number
108272840
Date Filed
April 20, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
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