US Patent 6998571 Laser beam processing machine
Patent 6998571 was granted and assigned to Disco Corporation on February, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
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Patent Inventor Names
Kazuma Sekiya0
Toshiyuki Yoshikawa0
Date of Patent
February 14, 2006
0Patent Application Number
108272840
Date Filed
April 20, 2004
0Patent Primary Examiner
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US Patent 6998571 Laser beam processing machine
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