Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hung Chih Chen0
Steven M. Zuniga0
Date of Patent
February 21, 2006
0Patent Application Number
110541280
Date Filed
February 8, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A carrier head that has a base assembly and a flexible membrane. The flexible membrane has a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers.
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