US Patent 7001257 Multi-chamber carrier head with a flexible membrane
Patent 7001257 was granted and assigned to Applied Materials on February, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A carrier head that has a base assembly and a flexible membrane. The flexible membrane has a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers.
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Current Assignee
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Patent Inventor Names
Hung Chih Chen0
Steven M. Zuniga0
Date of Patent
February 21, 2006
0Patent Application Number
110541280
Date Filed
February 8, 2005
0Patent Primary Examiner
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US Patent 7001257 Multi-chamber carrier head with a flexible membrane
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