Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John Quanci0
Zhendong Liu0
Date of Patent
March 28, 2006
0Patent Application Number
106344370
Date Filed
August 5, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An aqueous polishing composition comprises a corrosion inhibitor for limiting removal of an interconnect metal with an acidic pH. The composition includes an organic-containing ammonium salt formed with R1, R2, R3 and R4 are radicals, R1 has a carbon chain length of 2 to 15 carbon atoms. The organic-containing ammonium salt has a concentration that accelerates TEOS removal and decreases removal of at least one coating selected from the group consisting of SiC, SiCN, Si3N4 and SiCO.
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