US Patent 7018941 Post treatment of low k dielectric films
Patent 7018941 was granted and assigned to Applied Materials on March, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 21, 2004
0
Date of Patent
March 28, 2006
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Patent Application Number
10830203
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Patent Inventor Names
Helen R. Armer
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Alexandros T. Demos
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Derek R. Witty
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Girish A. Dixit
0
Hichem M'Saad
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Josephine J. Chang
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Reza Arghavani
0
Zhenjiang Cui
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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