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US Patent 7078650 Micro-machining employing multiple independently focused and independently steered beams

Patent 7078650 was granted and assigned to Orbotech on July, 2006 by the United States Patent and Trademark Office.

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Patent abstract

A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.

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