US Patent 7078650 Micro-machining employing multiple independently focused and independently steered beams
Patent 7078650 was granted and assigned to Orbotech on July, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
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Patent Inventor Names
Abraham Gross0
Dan Alon0
Eliezer Lipman0
Zvi Kotler0
Date of Patent
July 18, 2006
0Patent Application Number
107428380
Date Filed
December 23, 2003
0Patent Primary Examiner
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US Patent 7078650 Micro-machining employing multiple independently focused and independently steered beams
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