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US Patent 7079597 Method and circuit for acquisition

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Date Filed
October 2, 2000
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Date of Patent
July 18, 2006
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Patent Application Number
10049808
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Patent Citations Received
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 11972928 Method and system for plasma processing arc suppression
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US Patent 12002611 High power low frequency coils
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 11887820 Sector shunts for plasma-based wafer processing systems
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US Patent 11923175 Systems and methods for variable gain tuning of matching networks
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US Patent 11961711 Radio frequency match network and generator
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Patent Inventor Names
Akihiro Horii
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Kenichi Shiraishi
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Shoji Matsuda
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7079597
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Patent Primary Examiner
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Tesfaldet Bocure
0

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