US Patent 7092826 Semiconductor wafer inspection system
Patent 7092826 was granted and assigned to Qcept Technologies on August, 2006 by the United States Patent and Trademark Office.
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Patent Inventor Names
Jeffrey Alan Hawthorne0
M. Brandon Steele0
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Patent abstract
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
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US Patent 07092826 Semiconductor wafer inspection system US Patent 7092826 Semiconductor wafer inspection system
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Patent Number
070928260
Patent Number
70928260
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Current Assignee
Patent Jurisdiction
Patent Number
070928260
Date of Patent
August 15, 2006
0Patent Application Number
111560880
Date Filed
June 17, 2005
0Official Website
Patent Primary Examiner
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US Patent 07092826 Semiconductor wafer inspection system
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07092826
Date of patent
August 15, 2006
Patent application number
11156088
Date Filed
June 17, 2005
Patent primary examiner
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