Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chih Lung Lan0
An Shen Hwang0
Date of Patent
August 22, 2006
0Patent Application Number
107616920
Date Filed
January 20, 2004
0Patent Primary Examiner
Patent abstract
A jet clean nozzle having multiple spray openings which increase the scan density of pressurized water sprayed against the surface of a semiconductor wafer. The jet clean nozzle includes a nozzle body for attachment to a nozzle adaptor that communicates with a water jet pump. Multiple spray chambers extend into the nozzle body, and a spray opening communicates with each spray chamber. In use, pressurized water is forced through the respective spray openings and ejected from the spray chambers as multiple water jets.
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