US Patent 7093777 Jet clean nozzle with multiple spray openings
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Patent Inventor Names
An Shen Hwang0
Chih Lung Lan0
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Patent abstract
A jet clean nozzle having multiple spray openings which increase the scan density of pressurized water sprayed against the surface of a semiconductor wafer. The jet clean nozzle includes a nozzle body for attachment to a nozzle adaptor that communicates with a water jet pump. Multiple spray chambers extend into the nozzle body, and a spray opening communicates with each spray chamber. In use, pressurized water is forced through the respective spray openings and ejected from the spray chambers as multiple water jets.
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US Patent 07093777 Jet clean nozzle with multiple spray openings US Patent 7093777 Jet clean nozzle with multiple spray openings
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Patent Number
070937770
Patent Number
70937770
Edits on 23 May, 2023
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Official Website
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Patent Jurisdiction
Patent Number
070937770
Date of Patent
August 22, 2006
0Patent Application Number
107616920
Date Filed
January 20, 2004
0Official Website
Patent Primary Examiner
Edits on 7 Jun, 2022
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US Patent 07093777 Jet clean nozzle with multiple spray openings
Infobox
Is a
Patent jurisdiction
Patent number
07093777
Date of patent
August 22, 2006
Patent application number
10761692
Date Filed
January 20, 2004
Patent primary examiner
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