US Patent 7097536 Electrically enhanced surface planarization

Patent 7097536 was granted and assigned to Intel on August, 2006 by the United States Patent and Trademark Office.

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Date of Patent

August 29, 2006

Patent Application Number

10883499

Date Filed

June 30, 2004

Patent Primary Examiner

Patent abstract

A substrate processing apparatus equipped to employ electrical potential to assist in planarization and/or conditioning is provided.

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