US Patent 7097536 Electrically enhanced surface planarization
Patent 7097536 was granted and assigned to Intel on August, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A substrate processing apparatus equipped to employ electrical potential to assist in planarization and/or conditioning is provided.
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US Patent 07097536 Electrically enhanced surface planarization US Patent 7097536 Electrically enhanced surface planarization
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Patent Number
0709753600
Patent Number
709753600
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
070975360
Date of Patent
August 29, 2006
0Patent Application Number
108834990
Date Filed
June 30, 2004
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
070975360
Date of Patent
August 29, 2006
0Patent Application Number
108834990
Date Filed
June 30, 2004
0Official Website
Patent Primary Examiner
Edits on 7 Jun, 2022
Golden AI
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US Patent 07097536 Electrically enhanced surface planarization
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07097536
Date of patent
August 29, 2006
Patent application number
10883499
Date Filed
June 30, 2004
Patent primary examiner
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