Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
In-Kyun Shin0
Myung-Ah Kang0
Date of Patent
September 5, 2006
Patent Application Number
10368368
Date Filed
February 20, 2003
Patent Primary Examiner
Patent abstract
A method of manufacturing an alternating phase shift mask can be carried out in a short amount of time. A 180° phase shift region is formed using a multi-step etching process, and then a 0° phase region is formed. Forming the phase shift regions in this sequence minimizes the number of rounds of photolithography that have to be carried out in the method.
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