Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Tranchini0
Christopher Kirby0
Harvey C. Nathanson0
Robert M. Young0
Date of Patent
September 5, 2006
Patent Application Number
10839241
Date Filed
May 6, 2004
Patent Primary Examiner
Patent abstract
A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.
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