US Patent 7102472 MEMS device
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Patent Inventor Names
Christopher Kirby0
Harvey C. Nathanson0
Robert M. Young0
Robert Tranchini0
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Patent abstract
A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.
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US Patent 07102472 MEMS device US Patent 7102472 MEMS device
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Patent Number
07102472
Patent Number
7102472
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Official Website
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US Patent 07102472 MEMS device
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Is a
Patent jurisdiction
Patent number
07102472
Date of patent
September 5, 2006
Patent application number
10839241
Date Filed
May 6, 2004
Patent primary examiner
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