Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 19, 2006
0Patent Application Number
111879440
Date Filed
July 25, 2005
0Patent Primary Examiner
Patent abstract
A polishing apparatus and method has a function of polishing a surface of a film formed on a substrate to a flat mirror finish and a function of polishing unnecessary metal film such as copper film deposited on an outer peripheral portion of the substrate to remove such unnecessary metal film. The polishing apparatus comprises a surface polishing mechanism comprising a polishing table having a polishing surface and a top ring for holding the substrate and pressing the substrate against the polishing surface of the polishing table to thereby polish a surface of the substrate, and an outer periphery polishing mechanism for polishing an outer peripheral portion of the substrate.
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