US Patent 7108589 Polishing apparatus and method
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Patent abstract
A polishing apparatus and method has a function of polishing a surface of a film formed on a substrate to a flat mirror finish and a function of polishing unnecessary metal film such as copper film deposited on an outer peripheral portion of the substrate to remove such unnecessary metal film. The polishing apparatus comprises a surface polishing mechanism comprising a polishing table having a polishing surface and a top ring for holding the substrate and pressing the substrate against the polishing surface of the polishing table to thereby polish a surface of the substrate, and an outer periphery polishing mechanism for polishing an outer peripheral portion of the substrate.
Edits on 31 Jul, 2023
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Patent Jurisdiction
Patent Number
71085890
Date of Patent
September 19, 2006
0Patent Application Number
111879440
Date Filed
July 25, 2005
0Patent Primary Examiner
Edits on 26 May, 2023
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US Patent 07108589 Polishing apparatus and method US Patent 7108589 Polishing apparatus and method
Infobox
Patent Number
0710858900
Patent Number
710858900
Edits on 28 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071085890
Date of Patent
September 19, 2006
0Patent Application Number
111879440
Date Filed
July 25, 2005
0Official Website
Patent Primary Examiner
Edits on 22 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071085890
Date of Patent
September 19, 2006
0Patent Application Number
111879440
Date Filed
July 25, 2005
0Official Website
Patent Primary Examiner
Edits on 7 Jun, 2022
Golden AI
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US Patent 07108589 Polishing apparatus and method
Infobox
Is a
Patent jurisdiction
Patent number
07108589
Date of patent
September 19, 2006
Patent application number
11187944
Date Filed
July 25, 2005
Patent primary examiner
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