US Patent 7108592 Substrate holding apparatus and polishing apparatus
All edits
Edits on 31 Aug, 2023
Golden AI
Edits made to:
Article (+491 characters)
Article
Patent abstract
The present invention relates to a substrate holding apparatus for holding a substrate such as a semiconductor wafer in a polishing apparatus for polishing the substrate to a flat finish. The substrate holding apparatus includes a vertically movable top ring body for holding the substrate, and an elastic membrane for defining a pressure chamber in the top ring body. A coating is applied to a surface of the elastic membrane which is brought into contact with the substrate.
Edits on 16 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07108592 Substrate holding apparatus and polishing apparatus US Patent 7108592 Substrate holding apparatus and polishing apparatus
Infobox
Patent Number
0710859200
Patent Number
710859200
Edits on 19 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 24 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071085920
Date of Patent
September 19, 2006
0Patent Application Number
108743170
Date Filed
June 24, 2004
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071085920
Date of Patent
September 19, 2006
0Patent Application Number
108743170
Date Filed
June 24, 2004
0Official Website
Patent Primary Examiner
Edits on 7 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 17 Nov, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07108592 Substrate holding apparatus and polishing apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07108592
Date of patent
September 19, 2006
Patent application number
10874317
Date Filed
June 24, 2004
Patent primary examiner
Find more entities like US Patent 7108592 Substrate holding apparatus and polishing apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
