Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 3, 2006
0Patent Application Number
107095520
Date Filed
May 13, 2004
0Patent Primary Examiner
Patent abstract
First, a substrate having at least a conducting layer is provided. Then, a CVD process is performed to form the Ti/TiN barrier layer onto the conducting layer. An examination procedure is followed, and if particles are detected in the Ti/TiN barrier layer, then a rework procedure is performed to remove the Ti/TiN barrier layer and to reform a new Ti/TiN barrier layer.
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