Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Grant Fitzgerald0
Katrin Jones0
Date of Patent
October 3, 2006
0Patent Application Number
104746040
Date Filed
April 11, 2002
0Patent Primary Examiner
Patent abstract
The present invention relates to the preparation of an x-ray photomask by exposing a free-standing film of a radiation sensitive metal/chalcogenide to an electron beam scanned in a defined pattern so as to generate areas in the film of reduced metal content in accordance with the defined pattern, as well as novel x-ray photomasks.
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