US Patent 7115342 Preparation of photomasks
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Patent Inventor Names
Alexander Grant Fitzgerald0
Katrin Jones0
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Patent abstract
The present invention relates to the preparation of an x-ray photomask by exposing a free-standing film of a radiation sensitive metal/chalcogenide to an electron beam scanned in a defined pattern so as to generate areas in the film of reduced metal content in accordance with the defined pattern, as well as novel x-ray photomasks.
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US Patent 07115342 Preparation of photomasks US Patent 7115342 Preparation of photomasks
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Patent Number
071153420
Patent Number
71153420
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Patent Jurisdiction
Patent Number
071153420
Date of Patent
October 3, 2006
0Patent Application Number
104746040
Date Filed
April 11, 2002
0Official Website
Patent Primary Examiner
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US Patent 07115342 Preparation of photomasks
Infobox
Is a
Patent jurisdiction
Patent number
07115342
Date of patent
October 3, 2006
Patent application number
10474604
Date Filed
April 11, 2002
Patent primary examiner
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