Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 3, 2006
Patent Application Number
10777060
Date Filed
February 13, 2004
Patent Primary Examiner
Patent abstract
A semitransparent phase shifting mask has, in the periphery of a pattern element area, a light shielding portion which is formed by a semitransparent phase shifting portion and a transparent portion with the optimal size combination. A pattern is formed employing the semitransparent phase shifting mask.
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