Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshinobu Nakada0
Takaaki Shiota0
Date of Patent
October 17, 2006
0Patent Application Number
107062660
Date Filed
November 13, 2003
0Patent Primary Examiner
Patent abstract
A silicon wafer wherein stacking fault (SF) nuclei are distributed throughout the entire in-plane direction, and the density of the stacking fault nuclei is set to a range of between 0.5×108 cm−3 and 1×1011 cm−3.
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