Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 7, 2006
Patent Application Number
11134580
Date Filed
May 20, 2005
Patent Primary Examiner
Patent abstract
A polishing pad (104) having an annular polishing track (122) and including a plurality of grooves (148) that each traverse the polishing track. Each groove includes a plurality of flow control segments (CS1–CS3) and at least two discontinuities in slope (D1, D2) located within the polishing track.
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