US Patent 7131895 CMP pad having a radially alternating groove segment configuration
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Patent abstract
A polishing pad (104) having an annular polishing track (122) and including a plurality of grooves (148) that each traverse the polishing track. Each groove includes a plurality of flow control segments (CS1–CS3) and at least two discontinuities in slope (D1, D2) located within the polishing track.
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US Patent 07131895 CMP pad having a radially alternating groove segment configuration US Patent 7131895 CMP pad having a radially alternating groove segment configuration
Infobox
Patent Number
0713189500
Patent Number
713189500
Edits on 7 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071318950
Date of Patent
November 7, 2006
0Patent Application Number
111345800
Date Filed
May 20, 2005
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071318950
Date of Patent
November 7, 2006
0Patent Application Number
111345800
Date Filed
May 20, 2005
0Official Website
Patent Primary Examiner
Edits on 8 Jun, 2022
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Edits on 18 Nov, 2021
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US Patent 07131895 CMP pad having a radially alternating groove segment configuration
Infobox
Is a
Patent jurisdiction
Patent number
07131895
Date of patent
November 7, 2006
Patent application number
11134580
Date Filed
May 20, 2005
Patent primary examiner
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