Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Natsumi Shimogawa0
Yukihisa Takeuchi0
Tsutomu Nanataki0
Koji Kimura0
Takayoshi Akao0
Date of Patent
November 28, 2006
0Patent Application Number
108967690
Date Filed
July 22, 2004
0Patent Primary Examiner
Patent abstract
An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
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