US Patent 7141915 Actuator device

Patent 7141915 was granted and assigned to NGK Insulators on November, 2006 by the United States Patent and Trademark Office.

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edited on 6 Sep, 2023

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Patent Inventor Names

Koji Kimura0

Natsumi Shimogawa0

Takayoshi Akao0

Tsutomu Nanataki0

Yukihisa Takeuchi0

Edits on 31 Aug, 2023

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edited on 31 Aug, 2023

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Patent abstract

An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=071419150

Edits on 17 May, 2023

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