Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Paul J. Gasloli0
Date of Patent
December 12, 2006
Patent Application Number
10930094
Date Filed
August 31, 2004
Patent Primary Examiner
Patent abstract
An optical thin film stack for a dark aperture is deposited using thermal ion-assisted deposition (“IAD”). The IAD provides an energetic deposition of chromium and chromium oxide that results in a dark mirror optical thin film stack with superior etch properties. Edge definition is improved, and the edge profile is controllable by the selection of IAD parameters. An in situ IAD cleaning process can be used to clean the substrate sufficiently so that an intermediate adhesion layer of chromium is not required.
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