Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John Grunwald0
Date of Patent
December 12, 2006
0Patent Application Number
112435630
Date Filed
October 5, 2005
0Patent Primary Examiner
Patent abstract
A composition and process for the precision polishing of substrates such as semi-conductor chips is disclosed. The composition and process make use of soluble or insoluble organic nitro compounds as oxidizers and/or abrasive particles. Nitrogen containing reduction products of the foregoing organic nitro compounds may also be included.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
